Physics of radio-frequency plasmas
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
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| Format: | Electronic eBook |
| Language: | English |
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Cambridge ; New York :
Cambridge University Press,
2011.
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| Online Access: | Full text (Wentworth users only) |