Plasma deposited thin films /
In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.
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| Format: | Electronic eBook |
| Language: | English |
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Boca Raton, FL :
CRC Press, an imprint of Taylor and Francis,
[2018]
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| Online Access: | Full text (WIT users only) |