Principles of MEMS /

"The building blocks of MEMS design through closed-form solutions. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles...

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Bibliographic Details
Main Author: Lee, Ki Bang
Format: Electronic eBook
Language:English
Published: Hoboken, N.J. : WILEY, ?2010.
Subjects:
Online Access:Full text (Wentworth users only)